See ENRIS 2019

Programme

Programme overview

Sunday 16th June

13:00

Registration

14:00

DISCUSSIONS ON INFRASTRUCTURE AND VALORISATION RELATED TOPICS

Moderator: Pieter Telleman

Participation NanoLab consortia

Location: Waaier

17:00

TOURS

NanoLab, High Tech Factory

From 19:00

EVENING PROGRAMME

Location: U-Park

Monday 17th June

08:00

Registration

09:00

START PROGRAM WITH KEYNOTE SPEAKER

Chair: Gerard Roelofs

 

Keynote Speaker: Dennis Grimard

Building MIT.nano … a philosophical journey to the nanoscale

09:45

PROCESSES

09.45-10.10 | Thierry Chevolleau

Etch process cleaning to improve wafer to wafer reproducibility

 

10.10-10.35 | Nils Nordel

A production Chemical Mechanical Planarization (CMP) tool in a research environment

 

10.35-11.00 | Jesper Hanberg

A flexible equipment proces datalog and sample tracking system

10:45

Break

11:00

STAFFING

11.15-11.40 | Benjamin Reig

New user’s training procedure in an open academic platform: LAAS-CNRS example


11.40-12.05 | Anders Jorgensen

Multistage microfabrication introduction package


12.05-12.30 | Christiaan Bruinink

SPC initiatives in the MESA+ NanoLab Cleanroom

12:30

Lunch

13:30

CONTINUE PROGRAM WITH KEYNOTE SPEAKER

Chair: Frank Dirne


Keynote Speaker: Erwin Kessels

Atomic layer deposition: a true and enabling nanotechnology

14:15

EMERGING FABRICATION TECHNOLOGIES

14.15-14.40 | Norbert Koster

New EUV exposure system with XPS system


14.40-15.05 | Manuel Lozano 

Staff Organization in the IMB-CNM Cleanroom 


15.05-15.30 | Henri Janssen

Generic build-up of nanoscale silicon plasma etch processes’

15:30

Break

15:45

VALORIZATION

15.45-16.10 | Hugues Granier

Auditable billing of audited tariffs: a methodology for platform functioning funding


16.10-16.35 | Yoshio Mita

Japanese Nanotechnology Platform and a Trial Long-term Engineer Exchange between CNRSRENATECH and UTokyo Nanofab Site


16.35-17.00 | David Barth

NEMO: An open source, Collaboratively Developed Soft Management System


17.00-17.25 | Graeme Maxwell

Tyndall 2025 – Core equipment upgrade programme and transition to a Smart Manufacturing


17.25-17.50 | Lorenza Ferrario

The It-fab information system to address controlled process sharing among facilities

18:00

Closing

18:30

Transport to Conference Dinner

From 20:00

Conference dinner

Tuesday 18th June

09:00

START PORGRAM WITH KEYNOTE SPEAKER

Chair: Jorg Hubner

Keynote speaker: Guus Rijnders

09:45

INFRASTRUCTURE

09.45-10.10 | Jorg Scholvin

Understanding and Localizing Vibration Noise Sources


10.10-10.35 | Frans Segerink

Setting up a very low noise continuous vibration monitoring system and evaluating


10.35-11.00 | Leif Johansen

Risk management system for critical cleanroom supplies the measurements.

11:00

Break

11:15

TRL INFRASTRUCTURE

Pieter Telleman, Jorg Hubner and Noah Clay

12:30

Lunch

13:30

CONTINU PROGRAM WITH KEYNOTE SPEAKER

Chair: Noah Clay

Keynote speaker: Gary Steele

14:15

COMPANY TALKS

14.15-14.35 | Latticegear

Cleaving is a science


14.35-14.55 | Elis

Connected Cleanroom


14.55-15.15 | Kurt Lesker


15.15-15.35 | PolyTeknik

Towards research 4.0 – automated process development and characterisation

16:15

Closing

Keynote speakers

Erwin Kessels

Erwin Kessels is a full professor at the Department of Applied Physics of Eindhoven University of Technology (TU/e). He is also the scientific director of the NanoLab@TU/e facilities which provides full-service and open-access clean room infrastructure for R&D in nanotechnology.

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Gary Steele

Gary Steele is an Antoni van Leeuwenhoek Professor in the Quantum Nanoscience department at the Delft University of Technology. His research focusses on using quantum circuits for applications in mechanical quantum sensing, in probing materials, and for analogue quantum simulation.

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Dennis S. Grimard

Dennis S. Grimard received his Associates of Engineering (A.E.) degree in Mechanical Engineering Technology from Vermont Technical College in 1977 and his Bachelor of Science (B.S.) degree in electrical engineering from Worcester Polytechnic Institute in 1982. His postgraduate work includes both a Master of Science (M.S.) and Doctor of Philosophy (Ph.D.) degrees in electrical engineering (majoring in Solid-State Physics and minoring in Circuits) from The University of Michigan at Ann Arbor in 1984 and 1990, respectively. 

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prof.dr.ing. A.J.H.M. Rijnders (Guus)
Full Professor

Prof. Guus Rijnders is a professor at the University of Twente, the Netherlands. He obtained his PhD on October 31, 2001 on “Initial growth of complex oxides: study and manipulation”. In 2001 he became assistant professor at the Low Temperature Division, Applied Physics, University of Twente. In 2003 he switched to the Inorganic Materials Science group and since 2006 he was associate professor in this group. As of April 1st, 2010 he is full professor in nanoelectronic materials at the MESA+ Institute for Nanotechnology, University of Twente. As from 2015 he is Scientific director of the MESA+ Institute for Nanotechnology .

The research of Prof Guus Rijnders focuses on the structure‐property relation of atomically engineered complex (nano)materials, especially thin film oxides, mostly used for electronic and sensing devices. The class of investigated materials includes, amongst others, ferromagnetic, superconducting, ferroelectric as well as piezoelectric materials. In recent years, he started new research directions in the field of functional and smart materials, such as piezoelectric and ferroelectric materials, and their integration with electronic and micro electromechanical systems (MEMS), Si‐CMOS and III‐V technologies.

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