Programme overview
- Sunday 16th June
13:00
Registration
14:00
DISCUSSIONS ON INFRASTRUCTURE AND VALORISATION RELATED TOPICS
Moderator: Pieter Telleman
Participation NanoLab consortia
Location: Waaier
17:00
TOURS
NanoLab, High Tech Factory
From 19:00
EVENING PROGRAMME
Location: U-Park
- Monday 17th June
08:00
Registration
09:00
START PROGRAM WITH KEYNOTE SPEAKER
Chair: Gerard Roelofs
Keynote Speaker: Dennis Grimard
Building MIT.nano … a philosophical journey to the nanoscale
09:45
PROCESSES
09.45-10.10 | Thierry Chevolleau
Etch process cleaning to improve wafer to wafer reproducibility
10.10-10.35 | Nils Nordel
A production Chemical Mechanical Planarization (CMP) tool in a research environment
10.35-11.00 | Jesper Hanberg
A flexible equipment proces datalog and sample tracking system
10:45
Break
11:00
STAFFING
11.15-11.40 | Benjamin Reig
New user’s training procedure in an open academic platform: LAAS-CNRS example
11.40-12.05 | Anders Jorgensen
Multistage microfabrication introduction package
12.05-12.30 | Christiaan Bruinink
SPC initiatives in the MESA+ NanoLab Cleanroom
12:30
Lunch
13:30
CONTINUE PROGRAM WITH KEYNOTE SPEAKER
Chair: Frank Dirne
Keynote Speaker: Erwin Kessels
Atomic layer deposition: a true and enabling nanotechnology
14:15
EMERGING FABRICATION TECHNOLOGIES
14.15-14.40 | Norbert Koster
New EUV exposure system with XPS system
14.40-15.05 | Manuel Lozano
Staff Organization in the IMB-CNM Cleanroom
15.05-15.30 | Henri Janssen
Generic build-up of nanoscale silicon plasma etch processes’
15:30
Break
15:45
VALORIZATION
15.45-16.10 | Hugues Granier
Auditable billing of audited tariffs: a methodology for platform functioning funding
16.10-16.35 | Yoshio Mita
Japanese Nanotechnology Platform and a Trial Long-term Engineer Exchange between CNRSRENATECH and UTokyo Nanofab Site
16.35-17.00 | David Barth
NEMO: An open source, Collaboratively Developed Soft Management System
17.00-17.25 | Graeme Maxwell
Tyndall 2025 – Core equipment upgrade programme and transition to a Smart Manufacturing
17.25-17.50 | Lorenza Ferrario
The It-fab information system to address controlled process sharing among facilities
18:00
Closing
18:30
Transport to Conference Dinner
From 20:00
Conference dinner
- Tuesday 18th June
09:00
START PORGRAM WITH KEYNOTE SPEAKER
Chair: Jorg Hubner
Keynote speaker: Guus Rijnders
09:45
INFRASTRUCTURE
09.45-10.10 | Jorg Scholvin
Understanding and Localizing Vibration Noise Sources
10.10-10.35 | Frans Segerink
Setting up a very low noise continuous vibration monitoring system and evaluating
10.35-11.00 | Leif Johansen
Risk management system for critical cleanroom supplies the measurements.
11:00
Break
11:15
TRL INFRASTRUCTURE
Pieter Telleman, Jorg Hubner and Noah Clay
12:30
Lunch
13:30
CONTINU PROGRAM WITH KEYNOTE SPEAKER
Chair: Noah Clay
Keynote speaker: Gary Steele
14:15
COMPANY TALKS
14.15-14.35 | Latticegear
Cleaving is a science
14.35-14.55 | Elis
Connected Cleanroom
14.55-15.15 | Kurt Lesker
15.15-15.35 | PolyTeknik
Towards research 4.0 – automated process development and characterisation
16:15
Closing
Keynote speakers
Erwin Kessels is a full professor at the Department of Applied Physics of Eindhoven University of Technology (TU/e). He is also the scientific director of the NanoLab@TU/e facilities which provides full-service and open-access clean room infrastructure for R&D in nanotechnology.
Gary Steele is an Antoni van Leeuwenhoek Professor in the Quantum Nanoscience department at the Delft University of Technology. His research focusses on using quantum circuits for applications in mechanical quantum sensing, in probing materials, and for analogue quantum simulation.
Dennis S. Grimard received his Associates of Engineering (A.E.) degree in Mechanical Engineering Technology from Vermont Technical College in 1977 and his Bachelor of Science (B.S.) degree in electrical engineering from Worcester Polytechnic Institute in 1982. His postgraduate work includes both a Master of Science (M.S.) and Doctor of Philosophy (Ph.D.) degrees in electrical engineering (majoring in Solid-State Physics and minoring in Circuits) from The University of Michigan at Ann Arbor in 1984 and 1990, respectively.
Prof. Guus Rijnders is a professor at the University of Twente, the Netherlands. He obtained his PhD on October 31, 2001 on “Initial growth of complex oxides: study and manipulation”. In 2001 he became assistant professor at the Low Temperature Division, Applied Physics, University of Twente. In 2003 he switched to the Inorganic Materials Science group and since 2006 he was associate professor in this group. As of April 1st, 2010 he is full professor in nanoelectronic materials at the MESA+ Institute for Nanotechnology, University of Twente. As from 2015 he is Scientific director of the MESA+ Institute for Nanotechnology .
The research of Prof Guus Rijnders focuses on the structure‐property relation of atomically engineered complex (nano)materials, especially thin film oxides, mostly used for electronic and sensing devices. The class of investigated materials includes, amongst others, ferromagnetic, superconducting, ferroelectric as well as piezoelectric materials. In recent years, he started new research directions in the field of functional and smart materials, such as piezoelectric and ferroelectric materials, and their integration with electronic and micro electromechanical systems (MEMS), Si‐CMOS and III‐V technologies.