Programme overview
13:00 | Registration |
14:00 | DISCUSSIONS ON INFRASTRUCTURE AND VALORISATION RELATED TOPICS Moderator: Pieter Telleman Participation NanoLab consortia Location: Waaier |
17:00 | TOURS NanoLab, High Tech Factory |
From 19:00 | EVENING PROGRAMME Location: U-Park |
08:00 | Registration |
09:00 | START PROGRAM WITH KEYNOTE SPEAKER Chair: Gerard Roelofs
Keynote Speaker: Dennis Grimard Building MIT.nano … a philosophical journey to the nanoscale |
09:45 | PROCESSES 09.45-10.10 | Thierry Chevolleau Etch process cleaning to improve wafer to wafer reproducibility
10.10-10.35 | Nils Nordel A production Chemical Mechanical Planarization (CMP) tool in a research environment
10.35-11.00 | Jesper Hanberg A flexible equipment proces datalog and sample tracking system |
10:45 | Break |
11:00 | STAFFING 11.15-11.40 | Benjamin Reig New user’s training procedure in an open academic platform: LAAS-CNRS example 11.40-12.05 | Anders Jorgensen Multistage microfabrication introduction package 12.05-12.30 | Christiaan Bruinink SPC initiatives in the MESA+ NanoLab Cleanroom |
12:30 | Lunch |
13:30 | CONTINUE PROGRAM WITH KEYNOTE SPEAKER Chair: Frank Dirne Keynote Speaker: Erwin Kessels Atomic layer deposition: a true and enabling nanotechnology |
14:15 | EMERGING FABRICATION TECHNOLOGIES 14.15-14.40 | Norbert Koster New EUV exposure system with XPS system 14.40-15.05 | Manuel Lozano Staff Organization in the IMB-CNM Cleanroom 15.05-15.30 | Henri Janssen Generic build-up of nanoscale silicon plasma etch processes’ |
15:30 | Break |
15:45 | VALORIZATION 15.45-16.10 | Hugues Granier Auditable billing of audited tariffs: a methodology for platform functioning funding 16.10-16.35 | Yoshio Mita Japanese Nanotechnology Platform and a Trial Long-term Engineer Exchange between CNRSRENATECH and UTokyo Nanofab Site 16.35-17.00 | David Barth NEMO: An open source, Collaboratively Developed Soft Management System 17.00-17.25 | Graeme Maxwell Tyndall 2025 – Core equipment upgrade programme and transition to a Smart Manufacturing 17.25-17.50 | Lorenza Ferrario The It-fab information system to address controlled process sharing among facilities |
18:00 | Closing |
18:30 | Transport to Conference Dinner |
From 20:00 | Conference dinner |
09:00 | START PORGRAM WITH KEYNOTE SPEAKER Chair: Jorg Hubner Keynote speaker: Guus Rijnders |
09:45 | INFRASTRUCTURE 09.45-10.10 | Jorg Scholvin Understanding and Localizing Vibration Noise Sources 10.10-10.35 | Frans Segerink Setting up a very low noise continuous vibration monitoring system and evaluating 10.35-11.00 | Leif Johansen Risk management system for critical cleanroom supplies the measurements. |
11:00 | Break |
11:15 | TRL INFRASTRUCTURE Pieter Telleman, Jorg Hubner and Noah Clay |
12:30 | Lunch |
13:30 | CONTINU PROGRAM WITH KEYNOTE SPEAKER Chair: Noah Clay Keynote speaker: Gary Steele |
14:15 | COMPANY TALKS 14.15-14.35 | Latticegear Cleaving is a science 14.35-14.55 | Elis Connected Cleanroom 14.55-15.15 | Kurt Lesker 15.15-15.35 | PolyTeknik Towards research 4.0 – automated process development and characterisation |
16:15 | Closing |
Keynote speakers
Erwin Kessels is a full professor at the Department of Applied Physics of Eindhoven University of Technology (TU/e). He is also the scientific director of the NanoLab@TU/e facilities which provides full-service and open-access clean room infrastructure for R&D in nanotechnology.
Gary Steele is an Antoni van Leeuwenhoek Professor in the Quantum Nanoscience department at the Delft University of Technology. His research focusses on using quantum circuits for applications in mechanical quantum sensing, in probing materials, and for analogue quantum simulation.
Dennis S. Grimard received his Associates of Engineering (A.E.) degree in Mechanical Engineering Technology from Vermont Technical College in 1977 and his Bachelor of Science (B.S.) degree in electrical engineering from Worcester Polytechnic Institute in 1982. His postgraduate work includes both a Master of Science (M.S.) and Doctor of Philosophy (Ph.D.) degrees in electrical engineering (majoring in Solid-State Physics and minoring in Circuits) from The University of Michigan at Ann Arbor in 1984 and 1990, respectively.
Prof. Guus Rijnders is a professor at the University of Twente, the Netherlands. He obtained his PhD on October 31, 2001 on “Initial growth of complex oxides: study and manipulation”. In 2001 he became assistant professor at the Low Temperature Division, Applied Physics, University of Twente. In 2003 he switched to the Inorganic Materials Science group and since 2006 he was associate professor in this group. As of April 1st, 2010 he is full professor in nanoelectronic materials at the MESA+ Institute for Nanotechnology, University of Twente. As from 2015 he is Scientific director of the MESA+ Institute for Nanotechnology .
The research of Prof Guus Rijnders focuses on the structure‐property relation of atomically engineered complex (nano)materials, especially thin film oxides, mostly used for electronic and sensing devices. The class of investigated materials includes, amongst others, ferromagnetic, superconducting, ferroelectric as well as piezoelectric materials. In recent years, he started new research directions in the field of functional and smart materials, such as piezoelectric and ferroelectric materials, and their integration with electronic and micro electromechanical systems (MEMS), Si‐CMOS and III‐V technologies.